For general process. Wafer carrier and used to transfer between station and station. Provide suitable characteristics of the polymer composite material according to customer’s needs. It can collocation with airtight storage box to protect wafer.
● ESD material are provided.
● Use to transfer inside factory
● Able to go with airtight Storage Box to protect wafer
Material Degree of temperature resistance Property Application
PFA Cassette 200~220℃ Strong acid, strong hydrofluoric acid, strong base resistant For acid& base process
PP Cassette 40~60℃ Pros: Light weight, able to welding
Cons: Distort easily For general transfer process
PEEK Cassette 150~180℃ High hardness, not easy to distort, high temperature resistant
PBT Cassette 100~120℃ Fire resistant, greaseproof
PEI Cassette 130~150℃ Wear resistant, anti-static